- 開環行程100 µm
- 開環解析度0.2 nm
- Part #T-502-00
- 軸向1
產品特點
選擇型號
數量
| 名稱 | 單位 | PU 100 | PU 100 SG |
|---|---|---|---|
| Part # | - | T-502-00 | T-502-01 |
| 軸向 | - | 1 | 1 |
| 開環行程 (±10%)* | µm | 100 | 100 |
| 閉環行程 (±0.2%)* | µm | - | 80 |
| 開環解析度** | nm | 0.2 | 0.2 |
| 閉環解析度** | nm | - | 2.0 |
| 外觀尺寸 (長 x 寬 x 高) | mm | 50.5 x 25 x 25 | 50.5 x 25 x 25 |
| 重量 | g | 72 | 74 |
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
The PU 100 consists of only one metallic part that allows for excellent mechanical stability and the ability for it to work dynamically.
This translation stage shows a nearly linear motion by an applied voltage signal from -20 up to 130 V.
This stage can be combined for XYZ 3D motion systems. The basic flexure stage is equipped with the threads for mounting. Each piezo system is supplied with the necessary screws and parts for a multi-axis configuration.