- 開環行程100 µm
- 開環解析度0.2 nm
- Part #T-104-00
- 重量85 g
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PX 系列/單軸壓電平台
PX 100
產品說明
Due to the nature of the solid state flexure and parallelogram construction, the PX 100 stage can travel without any mechanical play, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.
The PX 100 can be equipped with integrated measurement systems that compensates for hysteresis. Depending on the exact system configuration, very accurate repeatability in the low nanometer range is possible.
Because of the integrated preload, the elements are able to perform dynamic work. They are therefore well suited for scanning applications in optics, semiconductor and molecular biological applications.
產品規格表
| - | 單位 | PX 100 | PX 100 SG |
|---|---|---|---|
| Part # | - | T-104-00 | T-104-01 |
| 軸向 | - | X | X |
| 開環行程 (±10%)* | µm | 100 | 100 |
| 閉環行程 (±0.2%)* | µm | – | 80 |
| 開環解析度** | nm | 0.2 | 0.2 |
| 閉環解析度** | nm | – | 2 |
| 外觀尺寸 (長 x 寬 x 高) | mm | 40 x 40 x 20 | 40 x 40 x 20 |
| 重量 | g | 85 | 90 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
相關文件
- PX-100-Datasheet.pdf下載
- PX-100-SG-Part-Drawing.pdf下載
- PX-100-Part-Drawing.pdf下載
常見問題
開迴路與閉迴路版本怎麼選？
需要絕對定位精度與重現性（量測、對位）選閉迴路；只需相對微動或掃描、且系統另有回授時，開迴路成本更低、響應更快。
可以先試機再決定嗎？
拿順為 piezosystem jena 台灣獨家總代理，備有常用展示機可預約測試，並提供中文選型與原廠技術對接。
PX 100 的報價與交期怎麼確認？
請將 PX 100 與您的行程、負載、精度需求加入詢價單，我們會協助選型確認並回覆原廠報價與交期。