- 開環行程100 µm
- 開環解析度0.2 nm
- Part #T-104-00
- 重量85 g
選擇型號
數量
L
o
a
d
i
n
g
.
.
.
L
o
a
d
i
n
g
.
.
.
PX 系列/單軸壓電平台
PX 100
產品規格表
| - | 單位 | PX 100 | PX 100 SG |
|---|---|---|---|
| Part # | - | T-104-00 | T-104-01 |
| 軸向 | - | X | X |
| 開環行程 (±10%)* | µm | 100 | 100 |
| 閉環行程 (±0.2%)* | µm | – | 80 |
| 開環解析度** | nm | 0.2 | 0.2 |
| 閉環解析度** | nm | – | 2 |
| 外觀尺寸 (長 x 寬 x 高) | mm | 40 x 40 x 20 | 40 x 40 x 20 |
| 重量 | g | 85 | 90 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
產品說明
Due to the nature of the solid state flexure and parallelogram construction, the PX 100 stage can travel without any mechanical play, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.
The PX 100 can be equipped with integrated measurement systems that compensates for hysteresis. Depending on the exact system configuration, very accurate repeatability in the low nanometer range is possible.
Because of the integrated preload, the elements are able to perform dynamic work. They are therefore well suited for scanning applications in optics, semiconductor and molecular biological applications.
相關文件
- PX-100-Datasheet.pdf下載
- PX-100-SG-Part-Drawing.pdf下載
- PX-100-Part-Drawing.pdf下載