PX 系列/單軸壓電平台
PX 400
- 開迴路行程400 µm
- 開迴路解析度0.8 nm
- Part #T-108-00
- 重量175 g
選擇型號
數量
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產品規格表
| - | 單位 | PX 400 | PX 400 CAP | PX 400 CAP |
|---|---|---|---|---|
| Part # | - | T-108-00 | T-108-01 | T108-06 |
| 軸向 | - | X | X | X |
| 開迴路行程 (±10%)* | µm | 400 | – | – |
| 閉迴路行程 (±0.2%)* | µm | – | 320 | 320 |
| 開迴路解析度** | nm | 0.8 | – | – |
| 閉迴路解析度** | nm | – | 8 | 4 |
| 外觀尺寸 (長 x 寬 x 高) | mm | 52 x 48 x 20 | 52 x 48 x 20 | 70.7 x 48 x 20 |
| 重量 | g | 175 | 175 | 210 |
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
產品說明
The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play. They provide a much higher resolution than is possible with mechanical or electromechanical systems.
The PX 400 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.
These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.
相關文件
- PX-200-300-400-Datasheet.pdf下載
- PX-400-SG-Part-Drawing-1.pdf下載
- PX-400-CAP-Part-Drawing-1.pdf下載