- 開環行程200 µm
- 開環解析度0.4 nm
- Part #T-106-00
- 重量175 g
選擇型號
數量
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PX 系列/單軸壓電平台
PX 200
產品規格表
| 名稱 | 單位 | PX 200 | PX 200 SG | PX 200 CAP |
|---|---|---|---|---|
| Part # | - | T-106-00 | T-106-01 | T-106-06 |
| 軸向 | - | X | X | X |
| 開環行程 (±10%)* | µm | 200 | – | – |
| 閉環行程 (±0.2%)* | µm | – | 160 | 160 |
| 開環解析度** | nm | 0.4 | – | – |
| 閉環解析度** | nm | – | 4 | 2 |
| 外觀尺寸 (長 x 寬 x 高) | mm | 52 x 48 x 20 | 52 x 48 x 20 | 70.5 x 48 x 20 |
| 重量 | g | 175 | 180 | 210 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
產品說明
The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play in the X and Z directions. They provide a much higher resolution than is possible with mechanical or electromechanical systems.
The PX 200 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with large degrees of freedom.
These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.
相關文件
- PX-200-300-400-Datasheet.pdf下載
- PX-200-Part-Drawing.pdf下載