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piezosystem jena 创立于德国耶拿，专注于奈米级压电致动与定位解决方案。凭借 30 年以上经验与德国精密工艺，产品广泛应用于光学、生命科学、半导体与精密制造，并提供高精度、高可靠性的标准与客制化平台。

Piezosystem Jena 单轴压电平台 PZ 系列 PZ 250 CAP WL

产品介绍

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PZ 系列/单轴压电平台

PZ 250 CAP WL

piezosystem jena 台湾独家总代理

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产品说明

The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.

The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.

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