- 開環行程38 µm
- 開環解析度0.08 nm
- Part #T-102-00
- 重量40 g
選擇型號
數量
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PZ 系列/單軸壓電平台
PZ 38
產品規格表
| - | 單位 | PZ 38 | PZ 38 SG | PZ 38 CAP |
|---|---|---|---|---|
| Part # | - | T-102-00 | T-102-01 | T-102-06 |
| 軸向 | - | Z | Z | Z |
| 開環行程 (±10%)* | µm | 38 | – | – |
| 閉環行程 (±0.2%)* | µm | – | 32 | 32 |
| 開環解析度** | nm | 0.08 | – | – |
| 閉環解析度** | nm | – | 0.7 | 0.7 |
| 外觀尺寸 (長 x 寬 x 高) | mm | 25 x 25 x 18 | 40 x 40 x 25 | 32 x 25 x 22 |
| 重量 | g | 40 | 77 | 100 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
產品說明
Due to solid state flexure and parallelogram construction, the PZ 38 nano-positioning stage can travel without any mechanical play in the X and Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 38 can optionally be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.
相關文件
- PZ-38-Datasheet.pdf下載
- PZ-38-CAP-Part-Drawing.pdf下載
- PZ-38-SG-Part-Drawing.pdf下載
- PZ-38-Part-Drawing.pdf下載