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piezosystem jena 創立於德國耶拿，專注於奈米級壓電致動與定位解決方案。憑藉 30 年以上經驗與德國精密工藝，產品廣泛應用於光學、生命科學、半導體與精密製造，並提供高精度、高可靠性的標準與客製化平台。

Piezosystem Jena 單軸壓電平台 PZ 系列 PZ 250 CAP WL

產品介紹

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PZ 系列/單軸壓電平台

PZ 250 CAP WL

piezosystem jena 台灣獨家總代理

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產品說明

The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.

The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.

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