- 開環行程400 µm
- 開環解析度0.8 nm
- Part #T-118-00
- 重量155 g
選擇型號
數量
L
o
a
d
i
n
g
.
.
.
L
o
a
d
i
n
g
.
.
.
PZ 系列/單軸壓電平台
PZ 400
產品規格表
| 規格項目 | 單位 | PZ 400 | PZ 400 SG |
|---|---|---|---|
| Part # | - | T-118-00 | T-118-01 |
| 軸向 | - | Z | Z |
| 開環行程 (±10%)* | µm | 400 | 400 |
| 閉環行程 (±0.2%)* | µm | – | 320 |
| 開環解析度** | nm | 0.8 | 0.8 |
| 閉環解析度** | nm | – | 8 |
| 外觀尺寸 (長 x 寬 x 高) | mm | 52 x 48 x 28.5 | 52 x 48 x 28.5 |
| 重量 | g | 155 | 175 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
產品說明
Due to solid state flexure and parallelogram construction, the PZ 400 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 400 can optionally be equipped with an integrated measurement system (strain gauge or capacitive sensors) that compensates for drift and hysteresis.
相關文件
- PZ-400-Datasheet.pdf下載
- PZ-400-Part-Drawing.pdf下載
- PZ-400-SG-Part-Drawing.pdf下載