- 开环行程200 µm
- 开环解析度0.4 nm
- Part #T-106-00
- 重量175 g
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PX 系列/单轴压电平台
PX 200
产品规格表
| 名称 | 单位 | PX 200 | PX 200 SG | PX 200 CAP |
|---|---|---|---|---|
| Part # | - | T-106-00 | T-106-01 | T-106-06 |
| 轴向 | - | X | X | X |
| 开环行程 (±10%)* | µm | 200 | – | – |
| 闭环行程 (±0.2%)* | µm | – | 160 | 160 |
| 开环解析度** | nm | 0.4 | – | – |
| 闭环解析度** | nm | – | 4 | 2 |
| 外观尺寸 (长 x 宽 x 高) | mm | 52 x 48 x 20 | 52 x 48 x 20 | 70.5 x 48 x 20 |
| 重量 | g | 175 | 180 | 210 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
产品说明
The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play in the X and Z directions. They provide a much higher resolution than is possible with mechanical or electromechanical systems.
The PX 200 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with large degrees of freedom.
These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.
相关文件
- PX-200-300-400-Datasheet.pdf下载
- PX-200-Part-Drawing.pdf下载