- 开环行程39 µm
- 开环解析度0.07 nm
- Part #T-101-00
- 重量40 g
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PX 系列/单轴压电平台
PX 38
产品规格表
| PX系列 | 单位 | PX 38 | PX 38 SG |
|---|---|---|---|
| Part # | - | T-101-00 | T-101-01 |
| 轴向 | - | X | X |
| 开环行程 (±10%)* | µm | 39 | – |
| 闭环行程 (±0.2%)* | µm | – | 32 |
| 开环解析度** | nm | 0.07 | – |
| 闭环解析度** | nm | – | 0.7 |
| 外观尺寸 (长 x 宽 x 高) | mm | 25 x 25 x 18 | 40 x 40 x 25 |
| 重量 | g | 40 | 77 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
产品说明
PX products are single-axis positioning stages with a motion range up to 38 microns. Due to the nature of the solid state flexure and parallelogram construction, these stages are free of mechanical play.
Based on their compact size, they can be easily integrated into customer sized set-ups. The high performance of the piezo electrical stack type actuator is the basic feature for stage accuracy.
They are ideally suited for nanometer precise positioning of optical components such as mirrors and laser diodes, adjustment and mounting in semiconductor technologies and electronics, and applications in measurement technologies, quality assurance and microbiology.
相关文件
- PX-38-Datasheet.pdf下载
- PX-38-Part-Drawing.pdf下载
- PX-38-SG-Part-Drawing.pdf下载