- 开回路行程400 µm
- 开回路解析度0.8 nm
- Part #T-108-00
- 重量175 g
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PX 系列/单轴压电平台
PX 400
产品规格表
| - | 单位 | PX 400 | PX 400 CAP | PX 400 CAP |
|---|---|---|---|---|
| Part # | - | T-108-00 | T-108-01 | T108-06 |
| 轴向 | - | X | X | X |
| 开回路行程 (±10%)* | µm | 400 | – | – |
| 闭回路行程 (±0.2%)* | µm | – | 320 | 320 |
| 开回路解析度** | nm | 0.8 | – | – |
| 闭回路解析度** | nm | – | 8 | 4 |
| 外观尺寸 (长 x 宽 x 高) | mm | 52 x 48 x 20 | 52 x 48 x 20 | 70.7 x 48 x 20 |
| 重量 | g | 175 | 175 | 210 |
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
产品说明
The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play. They provide a much higher resolution than is possible with mechanical or electromechanical systems.
The PX 400 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.
These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.
相关文件
- PX-200-300-400-Datasheet.pdf下载
- PX-400-SG-Part-Drawing-1.pdf下载
- PX-400-CAP-Part-Drawing-1.pdf下载