MS15 (3.5mm travel)
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| Specification | Unit | MS15 (3.5mm travel) |
|---|---|---|
| Travel | mm | 3.5 |
| Dimensions (W x D x H) | mm | 15 x 15 x 7 |
| Mass | g | 6 |
| Velocity | mm/s | 1.5 |
| Blocking force (Fx) | N | 3 |
| Bearing force (Fy, Fz) | N | 20 |
| Yaw / pitch angle | arcsec | 20 / 60 |
| Vertical / lateral deviation | um | 1 / 2 |
The MS15 is the smallest piezo inertial drive translation stage in the Mechonics portfolio. With a footprint of only 15 x 15 mm, a height of 7 mm and a mass of 6 g, it fits microscopy, optics and micro-assembly applications with extremely limited installation space.
With the CF30 controller a step width of approximately 10 nm is achieved, at velocities up to 1.5 mm/s. The bearing force (Fy, Fz) is 20 N, with a yaw angle of 20 arcsec and a pitch angle of 60 arcsec for excellent motion accuracy. The stages can be stacked into XY and XYZ systems, and vacuum and UHV editions are available.
