microTRITOR
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| 規格項目 | 單位 | microTRITOR |
|---|---|---|
| 軸向 | - | X, Y, Z |
| 開迴路運動範圍 (±10%) | µm | 9 |
| 解析度開迴路 | nm | 0.02 |
| 尺寸 (長 x 寬 x 高) | mm | 15 x 15 x 15 |
| 重量 | g | 12 |
The unique three-dimensional microTRITOR piezo stage uses extremely compact components with a mechanical design that achieves play-free parallel motion. Despite its minimal size, it achieves motion up to 9 µm on three axes with sub-nanometer resolution.
The microTRITOR can be easily integrated with other mechanical or electromagnetic positioning systems to create positioning systems with extremely high resolution. Due to its unique design, the microTRITOR is especially suitable for dynamic applications.
