- 開迴路運動範圍38 µm
- 解析度開迴路0.07 nm
- 重量57 g
Product Features
- 3D nano-positioning stage
- Compact design
- Flexure hinge design without mechanical play
- Motion range up to 38 µm
- Ultra-precise translation based on FEA-optimized parallelogram design
- High resolution positioning
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