- Travel3.5 mm
- Velocity1.5 mm/s
Product Features
- 3.5 mm travel in x, y and z direction
- Three MS15 stages combined with an L-bracket
- Footprint of only 15 x 15 mm per axis
- Ultra-light three-axis positioning system
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MS15 xyz-mounted
mechonics Distributor AsiaProduct Features
Quantity
Quick Inquiry
The MS15 xyz-mounted is an XYZ positioning system consisting of three ultra-small MS15 piezo inertial drive stages, with the z-axis mounted vertically on an L-bracket. It provides 3.5 mm of travel in all three directions and is ideal for fiber alignment, micro-probing and micromanipulation tasks with limited installation space.
Each stage has a footprint of only 15 x 15 mm, a height of 7 mm and a mass of 6 g. The maximum velocity is 1.5 mm/s, with a yaw angle of 20 arcsec and a pitch angle of 60 arcsec. Vacuum and UHV editions are available.
| Specification | Unit | MS15 xyz-mounted |
|---|---|---|
| Travel (x, y, z) | mm | 3.5 |
| Dimensions per stage (W x D x H) | mm | 15 x 15 x 7 |
| Mass per stage | g | 6 |
| Velocity | mm/s | 1.5 |
| Blocking forces (Fx, Fy, Fz) | N | 3 |
| Yaw / pitch angle | arcsec | 20 / 60 |
| Vertical / lateral deviation | um | 1 / 2 |