- Weight250 g
Product Features
- Travel range 120/100 µm (open-loop/closed-loop)
- Sub-nm resolution
- Excellent guidance accuracy
- High Z-axis stiffness
- 12.5 mm central aperture
- Compact design
Select Model
Quantity
L
o
a
d
i
n
g
.
.
.
Product Overview
L
o
a
d
i
n
g
.
.
.
nanoSXY series/High-Speed Piezo Stages
nanoSXY 120
Product Description
The nanoSXY 120 combines the high accuracy and speed of a piezo positioning system with a special actuating design for long travel motion. The stage offers a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12.5 mm.
The ultra flat design of the stage and the easy ability to combine it with an XY scanning system, makes the system especially useful for a wide variety of applications.
Based on the unique bi-directional actuating nanoX design, the nanoSXY 120 can move high load masses with a resolution of 0.25 nm. The design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time actively. The stage can be equipped with a high resolution feedback system for closed-loop control.
Fields of application include high resolution metrology, X and XY scanning, and dynamic positioning. The stages are also available in cryogenic and vacuum versions.
Product Specifications
| - | UNIT | nanoSXY 120 | nanoSXY 120 CAP |
|---|---|---|---|
| Part # | – | T-223-00 | T-223-06 |
| Axis | – | X, Y | X, Y |
| Motion in Open-Loop (±10%)* | µm | 120 | – |
| Motion in Closed-Loop (±0.2%)* | µm | – | 100 |
| Resolution Open-Loop** | nm | 0.24 | – |
| Resolution Closed-Loop** | nm | – | 1.0 |
| Dimensions (L x W x H) | mm | 60 x 60 x 20 | 60 x 87 x 30 |
| Weight | g | 250 | 350 |
*Typical value measured with a 30V300 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
Related Files
- nanoSXY-120-Datasheet.pdfDownload
- nanoSXY-120-CAP-Part-Drawing.pdfDownload
- nanoSXY-120-Part-Drawing.pdfDownload
FAQ
How do I choose between open-loop and closed-loop versions?
Choose closed-loop when you need absolute positioning accuracy and repeatability (e.g. measurement, alignment). Open-loop is more cost-effective and responds faster when you only need relative fine motion or scanning, or when your system already has its own feedback.
Can I test the unit before deciding?
Nahshon is the exclusive distributor of piezosystem jena in Taiwan and keeps commonly used demo units available for scheduled testing, with Chinese-language selection support and direct access to factory engineering.
How do I confirm pricing and lead time for nanoSXY 120?
Add nanoSXY 120 along with your stroke, load and accuracy requirements to your inquiry list, and we'll help confirm the selection and reply with the factory quote and lead time.