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The high load piezo positioner nanoX 200 is an ultra fast and high load capability nanoX stage. It provides a positioning and scanning range of up to 240 micrometers. The centrally located free aperture allows laser optical applications through the stage. Due to FEA-optimization, the nanoX 200 provides the highest dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact package. The nanoX series is made for nano-positioning tasks in the field of semiconductor, laser & optics and test & measurement. Vacuum and cryogenic versions as well as various body material options are available.
| Name | UNIT | nanoX 200 | nanoX 200 SG | nanoX 200 CAP |
|---|---|---|---|---|
| Part # | – | T-106-20 | T-106-21 | T-106-26 |
| Axis | – | X | X | X |
| Motion Open-Loop (±10%)* | µm | 240 | 240 | 240 |
| Motion Closed-Loop (±0.2%)* | µm | – | 200 | 200 |
| Resolution Open-Loop** | nm | 0.4 | 0.4 | 0.4 |
| Resolution Closed-Loop** | nm | – | 4 | 1 |
| Dimensions (L x W x H) | mm | 52 x 52 x 22 | 52 x 70 x 22 | 52 x 70 x 22 |
| Weight | g | 175 | 190 | 300 |
*Typical value measured with 30V300 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
