- Weight250 g
Product Features
- Up to 480 µm range of motion
- Sub-nm resolution
- High dynamic performance
- Excellent guidance accuracy
- Central aperture of ⌀ 3 mm
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Product Overview
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nanoX series/High-Speed Piezo Stages
nanoX 400
Product Description
The piezo based nanoX 400 is our ultra fast and high load positioning stage. It provides a positioning and scanning range of up to 480 micrometers. The centrally located free aperture allows laser optical applications through the stage. Due to FEA-optimization, the nanoX 400 provides the highest dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact package. The nanoX series is made for nano-positioning tasks in the field of semiconductor, laser & optics and test & measurement.
Product Specifications
| - | UNIT | nanoX 400 | nanoX 400 SG | nanoX 400 CAP |
|---|---|---|---|---|
| Part # | – | T-108-20 | T-108-21 | T-108-26 |
| Axis | – | X | X | X |
| Motion Open-Loop (±10%)* | µm | 480 | 480 | 480 |
| Motion Closed-Loop (±0.2%)* | µm | – | 400 | 400 |
| Resolution Open-Loop** | nm | 0.8 | 0.8 | 0.8 |
| Resolution Closed-Loop** | nm | – | 8 | 2 |
| Dimensions (L x W x H) | mm | 52 x 32 x 52 | 52 x 32 x 52 | 52 x 32 x 70 |
| Weight | g | 250 | 270 | 370 |
*Typical value measured with ENV40 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
Related Files
- nanoX-400-Datasheet.pdfDownload
- nanoX-400-CAP-Part-Drawing.pdfDownload
- nanoX-400-Part-Drawing.pdfDownload
FAQ
How do I choose between open-loop and closed-loop versions?
Choose closed-loop when you need absolute positioning accuracy and repeatability (e.g. measurement, alignment). Open-loop is more cost-effective and responds faster when you only need relative fine motion or scanning, or when your system already has its own feedback.
Can I test the unit before deciding?
Nahshon is the exclusive distributor of piezosystem jena in Taiwan and keeps commonly used demo units available for scheduled testing, with Chinese-language selection support and direct access to factory engineering.
How do I confirm pricing and lead time for nanoX 400?
Add nanoX 400 along with your stroke, load and accuracy requirements to your inquiry list, and we'll help confirm the selection and reply with the factory quote and lead time.