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Founded in Jena, Germany, piezosystem jena is a leading provider of nano-precision piezoelectric actuators and positioning solutions. With over 30 years of expertise, its products serve optics, life sciences, semiconductors, and precision manufacturing, delivering high accuracy and customizable performance.

Piezosystem Jena High-Speed Piezo Stages nanoX series nanoX 400

Product Overview

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nanoX series/High-Speed Piezo Stages

nanoX 400

Weight250 g

Product Features

Up to 480 µm range of motion
Sub-nm resolution
High dynamic performance
Excellent guidance accuracy
Central aperture of ⌀ 3 mm

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Product Specifications

-	UNIT	nanoX 400	nanoX 400 SG	nanoX 400 CAP
Part #	–	T-108-20	T-108-21	T-108-26
Axis	–	X	X	X
Motion Open-Loop (±10%)*	µm	480	480	480
Motion Closed-Loop (±0.2%)*	µm	–	400	400
Resolution Open-Loop**	nm	0.8	0.8	0.8
Resolution Closed-Loop**	nm	–	8	2
Dimensions (L x W x H)	mm	52 x 32 x 52	52 x 32 x 52	52 x 32 x 70
Weight	g	250	270	370

*Typical value measured with ENV40 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

Product Description

The piezo based nanoX 400 is our ultra fast and high load positioning stage. It provides a positioning and scanning range of up to 480 micrometers. The centrally located free aperture allows laser optical applications through the stage. Due to FEA-optimization, the nanoX 400 provides the highest dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact package. The nanoX series is made for nano-positioning tasks in the field of semiconductor, laser & optics and test & measurement.

Related Files

nanoX-400-Datasheet.pdfDownload
nanoX-400-CAP-Part-Drawing.pdfDownload
nanoX-400-Part-Drawing.pdfDownload