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| 規格項目 | 單位 | nanoMIPOS 400 | nanoMIPOS CAP |
|---|---|---|---|
| 軸向 | - | Z | Z |
| 開迴路運動（±10%） | 微米 | 400 | 400 |
| 閉迴路運動（±0.2%）* | 微米 | - | 320 |
| 開迴路解析度 | 奈米 | 180 | 180 |
| 閉迴路解析度 | 奈米 | - | 1 |
| 尺寸（直徑 x 高） | 毫米 | 65 x 45 x 40 | 65 x 45 x 40 |
| 重量 | 克 | 300 | 315 |
This nanoMIPOS 400 offers a nano-positioning and scanning range up to 400 µm in open-loop operation, as well as 320 µm in closed-loop. The system can be assembled with objectives of up to 39 mm in diameter.
The sophisticated monolithic guidance design, consisting of solid flexure hinges, means the trajectory is free of mechanical play and friction – a feature offered by all piezosystem jena stages.
The advanced nanoMIPOS 400 design is FEA optimized to show an outstanding minimum of lateral and rotational offset, as well as excellent guidance accuracy, while offering robustness against off center and lateral loads.
To avoid drift and hysteresis, the nanoMIPOS 400 can be equipped with a capacitive measurement system. In combination with the piezosystem jena controller, this system offers high stability, linearity, repeatability and accuracy in closed loop operation.
