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Founded in Jena, Germany, piezosystem jena is a leading provider of nano-precision piezoelectric actuators and positioning solutions. With over 30 years of expertise, its products serve optics, life sciences, semiconductors, and precision manufacturing, delivering high accuracy and customizable performance.

Piezosystem Jena xy positioner PXY frame PXY 16

Product Overview

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PXY frame/xy positioner

PXY 16

Weight725 g

Product Features

Motion in X and Y axis - up to 20 μm
High resonant frequency
High stiffness
Minimum Z motion
Center Aperture

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Product Specifications

規格項目	單位	PXY 16	PXY 16 CAP
零件編號	-	S-644-00	S-644-06
軸向	-	X, Y	X, Y
Motion in Open-Loop (±10%)*	μm	16	16
Motion in Closed-Loop (±0,2%)*	μm	-	12
Resolution Open-Loop**	nm	0.04	0.04
Resolution Closed-Loop**	nm	-	1
Dimensions (L x W x H)	mm	98×98×20	104×104×250
Weight	g	725	900

*Typical value measured with a NV 40/3 amplifier (closed loop: 30V300 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.

Product Description

The PXY 16 is a high-precision two-axis piezo positioning stage designed for applications requiring precise X-Y planar motion. This stage features a parallel flexure guidance structure that provides up to 16 micrometers of travel range in both X and Y axes while maintaining extremely low Z-axis crosstalk.

Key features include high resonant frequency, excellent stiffness, and a center aperture design, making it ideal for optical inspection, semiconductor processing, and microscopy applications. The stage is available with optional closed-loop strain gauge sensors (PXY 16 CAP) for enhanced positioning accuracy and long-term stability.

Related Files

PXY-16-Datasheet.pdfDownload
PXY-16-Part-Drawing.pdfDownload