- Weight725 g
Product Features
- Motion in X and Y axis - up to 20 μm
- High resonant frequency
- High stiffness
- Minimum Z motion
- Center Aperture
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Product Overview
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PXY frame/xy positioner
PXY 16
Product Description
The PXY 16 is a high-precision two-axis piezo positioning stage designed for applications requiring precise X-Y planar motion. This stage features a parallel flexure guidance structure that provides up to 16 micrometers of travel range in both X and Y axes while maintaining extremely low Z-axis crosstalk.
Key features include high resonant frequency, excellent stiffness, and a center aperture design, making it ideal for optical inspection, semiconductor processing, and microscopy applications. The stage is available with optional closed-loop strain gauge sensors (PXY 16 CAP) for enhanced positioning accuracy and long-term stability.
Product Specifications
| 規格項目 | 單位 | PXY 16 | PXY 16 CAP |
|---|---|---|---|
| 零件編號 | - | S-644-00 | S-644-06 |
| 軸向 | - | X, Y | X, Y |
| Motion in Open-Loop (±10%)* | μm | 16 | 16 |
| Motion in Closed-Loop (±0,2%)* | μm | - | 12 |
| Resolution Open-Loop** | nm | 0.04 | 0.04 |
| Resolution Closed-Loop** | nm | - | 1 |
| Dimensions (L x W x H) | mm | 98×98×20 | 104×104×250 |
| Weight | g | 725 | 900 |
*Typical value measured with a NV 40/3 amplifier (closed loop: 30V300 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.
Related Files
- PXY-16-Datasheet.pdfDownload
- PXY-16-Part-Drawing.pdfDownload
FAQ
How do I choose between open-loop and closed-loop versions?
Choose closed-loop when you need absolute positioning accuracy and repeatability (e.g. measurement, alignment). Open-loop is more cost-effective and responds faster when you only need relative fine motion or scanning, or when your system already has its own feedback.
Can I test the unit before deciding?
Nahshon is the exclusive distributor of piezosystem jena in Taiwan and keeps commonly used demo units available for scheduled testing, with Chinese-language selection support and direct access to factory engineering.
How do I confirm pricing and lead time for PXY 16?
Add PXY 16 along with your stroke, load and accuracy requirements to your inquiry list, and we'll help confirm the selection and reply with the factory quote and lead time.