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| - | UNIT | PXY 200 | PXY 200 SG |
|---|---|---|---|
| Part # | - | T-227-00 | T-227-01 |
| Axis | - | X, Y | X, Y |
| Motion in Open-Loop (±10%)* | μm | 200 | 200 |
| Motion in Closed-Loop (±0.2%)* | μm | - | 160 |
| Resolution Open-Loop** | nm | 0.4 | 0.4 |
| Resolution Closed-Loop** | nm | - | 4 |
| Dimensions (L x W x H) | mm | 70 x 70 x 25 | 70 x 70 x 25 |
| Weight | g | 350 | 350 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.
The PXY 200 uses solid state hinges in a parallelogram construction to provide parallel motion without mechanical play in the X and Y directions. This design result in high resolution which far surpasses the resolution of mechanical and electromechanical positioning systems. The piezo positioner PXY 200 series can be easily mounted to other positioning systems and can be equipped with a strain gauge measurement system that overcomes the effect of hysteresis. Dynamic operation is possible due to the piezo elements which are well suited for solving scanning problems.
