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| 規格項目 | 單位 | PZS 1 |
|---|---|---|
| Part # | – | O-101-00 |
| Opening (±10%) | µm | 0 to 230 |
| Capacitance (±20%) | µF | 1.8 |
| Resolution Open-Loop | nm | 0.05 |
| Resonant Frequency | Hz | 450 |
| Dimensions (L x W x H) | mm | 42 x 42 x 14 |
| Weight | g | 115 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.
The PZS 1 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better. The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).
