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Founded in Jena, Germany, piezosystem jena is a leading provider of nano-precision piezoelectric actuators and positioning solutions. With over 30 years of expertise, its products serve optics, life sciences, semiconductors, and precision manufacturing, delivering high accuracy and customizable performance.

Piezosystem Jena shutterslit systems PZS PZS 3

Product Overview

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PZS/shutterslit systems

PZS 3

Capacitance7.2 µF
Weight70 g

Product Features

Symmetrical movement of 2 slit edges
Driven by 1 piezo actuator
Opening up to 1500 µm
Nanometer resolution
Vacuum compatible version
Optional measurement system

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Product Specifications

規格項目	單位	PZS 3
Part #	–	0-103-00
Opening (±10%)*	µm	0 to 1500
Capacitance (±20%)	µF	7.2
Resolution Open-Loop**	nm	3
Resonant Frequency	Hz	200
Dimensions (L x W x H)	mm	96 x 25 x 14
Weight	g	70

*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.

Product Description

The PZS 3 system consists of two slit edges that are driven by a single piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used for the construction of this piezo slit element in order to ensure the synchronization of the slit edges with respect to the center line. This system is available in a UHV compatible version with a different body and slit edge material (INVAR).

Related Files

PZS-1-4-Datasheet.pdfDownload
PZS-3-Part-Drawing.pdfDownload