- Part #T-118-00
- Weight155 g
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| - | UNIT | PZ 400 | PZ 400 SG |
|---|---|---|---|
| Part # | - | T-118-00 | T-118-01 |
| Axis | - | Z | Z |
| Motion in Open-Loop (±10%)* | µm | 400 | 400 |
| Motion in Closed-Loop (±0.2%)* | µm | – | 320 |
| Resolution Open-Loop** | nm | 0.8 | 0.8 |
| Resolution Closed-Loop** | nm | – | 8 |
| Dimensions (L x W x H) | mm | 52 x 48 x 28.5 | 52 x 48 x 28.5 |
| Weight | g | 155 | 175 |
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.
Due to solid state flexure and parallelogram construction, the PZ 400 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 400 can optionally be equipped with an integrated measurement system (strain gauge or capacitive sensors) that compensates for drift and hysteresis.