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PZ Series/x and z translation stages
PZ 250 CAP WL
Product Description
The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.
The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.
Related Files
- PZ-250-CAP-WL-Datasheet.pdfDownload
- PZ-250-CAP-WL-Part-Drawing.pdfDownload
FAQ
How do I choose between open-loop and closed-loop versions?
Choose closed-loop when you need absolute positioning accuracy and repeatability (e.g. measurement, alignment). Open-loop is more cost-effective and responds faster when you only need relative fine motion or scanning, or when your system already has its own feedback.
Can I test the unit before deciding?
Nahshon is the exclusive distributor of piezosystem jena in Taiwan and keeps commonly used demo units available for scheduled testing, with Chinese-language selection support and direct access to factory engineering.
How do I confirm pricing and lead time for PZ 250 CAP WL?
Add PZ 250 CAP WL along with your stroke, load and accuracy requirements to your inquiry list, and we'll help confirm the selection and reply with the factory quote and lead time.
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