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Founded in Jena, Germany, piezosystem jena is a leading provider of nano-precision piezoelectric actuators and positioning solutions. With over 30 years of expertise, its products serve optics, life sciences, semiconductors, and precision manufacturing, delivering high accuracy and customizable performance.

Piezosystem Jena x and z translation stages PZ Series PZ 250 CAP WL

Product Overview

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PZ Series/x and z translation stages

PZ 250 CAP WL

Name: PZ 250 CAP WL
Brand: Piezosystem Jena
SKU: PZ 250 CAP WL
Availability: InStock

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Product Description

The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.

The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.

Related Files

PZ-250-CAP-WL-Datasheet.pdfDownload
PZ-250-CAP-WL-Part-Drawing.pdfDownload