nanoX - high speed positioner

Series Overview

When the application demands speed — high-frequency scanning, real-time focus tracking, vibration compensation — the resonant frequency of ordinary stages becomes the bottleneck. The high-dynamics series pushes resonance to several kHz with stiff parallel flexures and optimized moving mass, while keeping nanometer trajectory accuracy.

Key Features

• kHz-class resonant frequencies, millisecond settling
• Parallel-preload flexure guiding suppresses tilt under high acceleration
• Capacitive closed loop maintains nanometer accuracy in motion
• Full family: single-axis nanoX, long-travel nanoSX, two-axis nanoSXY

Typical Applications

• Dynamic focusing and Z compensation in laser processing
• High-speed focus tracking in wafer and panel inspection
• Phase modulation in interferometry
• High-speed image stabilization and scanning microscopy

Selection & Support

Key selection criteria: required scan frequency, travel and load mass (load lowers resonance). As the Taiwan distributor of piezosystem jena, Nahshon provides local technical support, selection assistance and factory quotations — add your requirements to the inquiry list or contact us directly.