High-Speed Piezo Stages
Series Overview
When the application demands speed — high-frequency scanning, real-time focus tracking, vibration compensation — the resonant frequency of ordinary stages becomes the bottleneck. The high-dynamics series pushes resonance to several kHz with stiff parallel flexures and optimized moving mass, while keeping nanometer trajectory accuracy.
Key Features
- kHz-class resonant frequencies, millisecond settling
- Parallel-preload flexure guiding suppresses tilt under high acceleration
- Capacitive closed loop maintains nanometer accuracy in motion
- Full family: single-axis nanoX, long-travel nanoSX, two-axis nanoSXY
Typical Applications
- Dynamic focusing and Z compensation in laser processing
- High-speed focus tracking in wafer and panel inspection
- Phase modulation in interferometry
- High-speed image stabilization and scanning microscopy
Selection & Support
Key selection criteria: required scan frequency, travel and load mass (load lowers resonance). As the Taiwan distributor of piezosystem jena, Nahshon provides local technical support, selection assistance and factory quotations — add your requirements to the inquiry list or contact us directly.
Product Series
nanoX series
nanoX single-axis high-speed stages suppress tilt with a parallel-preload structure, holding trajectory accuracy under high acceleration: kHz resonance plus capacitive closed loop — the single-axis choice for dynamic focusing and fast scanning.nanoSX series
nanoSX high-speed stages extend nanoX dynamics to longer travels (up to the 800 µm class): range and speed together, for 3D microscopy and fast topography measurement.nanoSXY series
nanoSXY two-axis high-speed stages deliver fast 2D scanning in a single frame: no stacked-axis inertia penalty, central aperture for transmitted light — the standard answer for fast in-plane scanning.
Featured Products
- Loading...nanoX 200View This Product
- 240 µm range of motion
- High dynamic performance
- Excellent guidance accuracy
- 0.4 nm resolution
- ⌀ 3 mm central aperture
- Vacuum and cryogenic versions available
- Body material variations of invar, superinvar, aluminum or titanium available
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nanoX 400View This Product- Up to 480 µm range of motion
- Sub-nm resolution
- High dynamic performance
- Excellent guidance accuracy
- Central aperture of ⌀ 3 mm
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nanoSX 800View This Product- Up to 900 µm range of motion
- Central aperture of 12.5 mm
- Sub-nm resolution
- Excellent trajectory trueness
- High load capability
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nanoSXY 120View This Product- Travel range 120/100 µm (open-loop/closed-loop)
- Sub-nm resolution
- Excellent guidance accuracy
- High Z-axis stiffness
- 12.5 mm central aperture
- Compact design
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nanoSXY 400View This Product- Travel range 400/320 µm (open-loop/closed-loop)
- Excellent guidance accuracy
- High Z-axis stiffness
- Ø 12.5 mm central aperture