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| 規格項目 | 新欄位 2 | 新欄位 3 | 新欄位 4 | 新欄位 5 | 新欄位 6 | 新欄位 7 | 新欄位 8 |
|---|---|---|---|---|---|---|---|
| 軸向 | - | X, Y, Z | X, Y, Z | X, Y, Z | X, Y, Z | X, Y, Z | X, Y, Z |
| 開迴路運動範圍 (±10%) | µm | 100 | 100 | 100 | 100 | 100 | 100 |
| 閉迴路運動範圍 | µm | - | 80 | 80 | - | 80 | 80 |
| 解析度 | nm | 0.2 | 2 | 0.2 | 0.2 | 2 | 0.2 |
| 尺寸 (L x W x H) | mm | 68 x 68 x 30 | 68 x 68 x 30 | 68 x 68 x 30 | 80 x 80 x 30 | 80 x 80 x 30 | 80 x 80 x 30 |
| 重量 | g | 480 | 570 | 570 | 520 | 610 | 610 |
The TRITOR 101 and TRITOR 102 are multi-axis piezo stages with a large central aperture. The TRITOR 101 has an aperture of 12.5 mm and the TRITOR 102 has an aperture of 40 mm. The parallel guided flexure configuration ensures play-free motion for the X, Y and Z axes. Like all other TRITOR types, the stages are optionally available with integrated strain gauge (SG) or capacitive (CAP) feedback sensors for closed-loop operation.
