- 開迴路運動範圍400 µm
- 開迴路解析度0.8 nm
- 重量1050 g
Product Features
- Highly compact design
- High reliability due to solid state hinges
- Motion without mechanical play
- XYZ motion range up to 400 µm
- Accurate parallel motion by parallelogram design
- High resolution in nm and sub-nm range
- Precision pin holes for easy mounting
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