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| 規格項目 | 新欄位 2 | 新欄位 3 | 新欄位 4 |
|---|---|---|---|
| 軸向 | - | X, Y, Z | X, Y, Z |
| 開迴路運動範圍 (±10%) | µm | 50/50/400 | 50/50/400 |
| 閉迴路運動範圍 | µm | - | 40/40/320 |
| 解析度 (開迴路) | nm | 0.1/0.1/0.8 | 0.1/0.1/0.8 |
| 尺寸 (L x W x H) | mm | 320 x 320 x 55 | 320 x 320 x 55 |
| 重量 | g | 8000 | 8000 |
The capability to move loads up to 20 kg makes the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensor for closed-loop control. The unique design of the flexure-hinges allows for excellent usability with zero friction. High stiffness, in combination with excellent straightness of motion, makes the TRITOR 320 ideal for high precision positioning in the nanometer range of heavy objects such as wafer chucks, bonding tools, and pick & place platforms.
