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Founded in Jena, Germany, piezosystem jena is a leading provider of nano-precision piezoelectric actuators and positioning solutions. With over 30 years of expertise, its products serve optics, life sciences, semiconductors, and precision manufacturing, delivering high accuracy and customizable performance.

Piezosystem Jena xyz positioner TRITOR TRITOR 320

Product Overview

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TRITOR/xyz positioner

TRITOR 320

piezosystem jena Exclusive Distributor Taiwan

重量8000 g

Product Features

3D piezo stage with 20 kg load capability
XYZ motion range up to 50/50/400 µm
150 x 150 mm open aperture
0.8 nm resolution
Smallest settling time and lowest trajectory deviation
Optional integrated capacitive sensor (closed-loop)

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Product Description

The capability to move loads up to 20 kg makes the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensor for closed-loop control. The unique design of the flexure-hinges allows for excellent usability with zero friction. High stiffness, in combination with excellent straightness of motion, makes the TRITOR 320 ideal for high precision positioning in the nanometer range of heavy objects such as wafer chucks, bonding tools, and pick & place platforms.

Product Specifications

規格項目	新欄位 2	新欄位 3	新欄位 4
軸向	-	X, Y, Z	X, Y, Z
開迴路運動範圍 (±10%)	µm	50/50/400	50/50/400
閉迴路運動範圍	µm	-	40/40/320
解析度 (開迴路)	nm	0.1/0.1/0.8	0.1/0.1/0.8
尺寸 (L x W x H)	mm	320 x 320 x 55	320 x 320 x 55
重量	g	8000	8000

Related Files

TRITOR-320-Datasheet.pdfDownload

FAQ

How do I choose between open-loop and closed-loop versions?

Choose closed-loop when you need absolute positioning accuracy and repeatability (e.g. measurement, alignment). Open-loop is more cost-effective and responds faster when you only need relative fine motion or scanning, or when your system already has its own feedback.

Can I test the unit before deciding?

Nahshon is the exclusive distributor of piezosystem jena in Taiwan and keeps commonly used demo units available for scheduled testing, with Chinese-language selection support and direct access to factory engineering.

How do I confirm pricing and lead time for TRITOR 320?

Add TRITOR 320 along with your stroke, load and accuracy requirements to your inquiry list, and we'll help confirm the selection and reply with the factory quote and lead time.

Tech Articles

Series Models

TRITOR

TRITOR 100 TRITOR 101&102TRITOR 320（This page）TRITOR 38 TRITOR 400

View All TRITOR Models →