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The unique three-dimensional TRITOR 38 piezo stage uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes can be realized with sub-nanometer resolution.
The unique cube design of the nano flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the TRITOR 38 is ideal for high precision positioning in the nanometer range for fiber alignment, laser technique and other types of high accurate micro-positioning applications.
The TRITOR 38 can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to the design the TRITOR 38 is suitable for dynamic applications.
| 規格項目 | 單位 | TRITOR 38 | TRITOR 38 SG |
|---|---|---|---|
| 軸向 | - | X, Y, Z | X, Y, Z |
| 開迴路運動範圍 (±10%) | µm | 38 | 38 |
| 閉迴路運動範圍 (±0.2%) | µm | - | 30 |
| 解析度開迴路 | nm | 0.07 | 0.8 |
| 尺寸 (長 x 寬 x 高) | mm | 25 x 25 x 25 | 40 x 40 x 33.5 |
| 重量 | g | 115 | 130 |
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