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| 規格項目 | 單位 | MIPOS 16-158 | MIPOS 16 M85 |
|---|---|---|---|
| 軸向 | - | Z | Z |
| 開迴路運動範圍 (±10%) | µm | 16 | 16 |
| 開迴路解析度 | nm | 0.04 | 0.04 |
| 尺寸 (長 x 寬) | mm | 158 x 42 | 93 x 50 |
| 重量 | g | 1240 | 300 |
MIPOS is designed for high precision optical system positioning with sub-nanometer accuracy. MIPOS 16 brings new possibilities with its high resolution and fast response time, especially suitable for white light interferometry.
MIPOS 16 features a unique design with a maximum aperture of 104 mm and a minimum platform height of only 42 mm. Its technical specifications fully meet the requirements of white light interference measurement. White light interferometry has become one of the most effective 3D surface measurement methods. Piezoelectric actuators offer nearly unlimited resolution and fast response time, significantly improving measurement accuracy and speed. MIPOS 16 operates in a voltage range of 20 to 130 V, achieving a focusing range of up to 16 µm and single-step resolution below 0.1 nm.
MIPOS 16 is designed for integration into metrology devices and equipment. This robust driver is equipped with a high-resolution piezoelectric drive system. Its internal mechanical preload design enables MIPOS to operate in highly dynamic environments while reducing settling time to microseconds.
