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| 規格項目 | 單位 | MIPOS 600 SG |
|---|---|---|
| 軸向 | - | Z |
| 開迴路運動範圍 (±10%) | µm | 600 |
| 閉迴路運動範圍 (±0.2%) | µm | 500 |
| 開迴路解析度 | nm | 0.9 |
| 閉迴路解析度 | nm | 12 |
| 共振頻率 | Hz | 220 |
| 尺寸 (長 x 寬 x 高) | mm | 60.5 x 50 x 40.1 |
| 重量 | g | 370 |
The MIPOS 600 SG offers a nanopositioning and scanning range up to 600 µm in open-loop operation, and 500 µm in closed-loop using a strain-gauge sensor. It can be used with objectives that have a diameter of up to 40 mm.
Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600 SG can be guaranteed by the use of the strain-gauge integrated measurement system.
The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion. Due to the unique features of the MIPOS 600 SG, fast scanning applications can be accurately realized with short settling times.
