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| 規格項目 | 單位 | MIPOS 800 | MIPOS 800 SG |
|---|---|---|---|
| 零件編號 | - | O-341-00D | O-341-01D |
| 軸向 | - | Z | Z |
| 開環運動（±10%）* | 微米 | 800 | 800 |
| 閉環運動（±0.2%）* | 微米 | – | 650 |
| 開環解析度** | 奈米 | 1 | 1 |
| 閉環解析度** | 奈米 | – | 12 |
| 尺寸（長 x 寬 x 高） | 毫米 | 76 x 56 x 49 | 76 x 56 x 49 |
| 重量 | 克 | 350 | 360 |
The MIPOS 800 objective positioner offers a nanopositioning scanning range up to 800 µm in open-loop operation, and 650 µm in closed-loop operation. The positioner can be used with objectives that have a diameter up to 40 mm.
A unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 800 can be guaranteed by the use of the integrated strain-gauge measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and a highly parallel motion.
Due to the unique design of the MIPOS 800, fast scanning applications can be accurately realized with short settling times.
